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EUV efficiency of a 6000-grooves per mm diffraction gratingIn order to explore whether grooves ruled mechanically at a density of 6000 per mm can perform well at EUV wavelengths, a sample grating is measured with this density in an EUV calibration facility. Measurements are presented of the planar uniform line-space diffraction grating's efficiency and large-angle scattering.
Document ID
19900046530
Acquisition Source
Legacy CDMS
Document Type
Reprint (Version printed in journal)
Authors
Hurwitz, Mark (California Univ. Berkeley, CA, United States)
Bowyer, Stuart (California Univ. Berkeley, CA, United States)
Edelstein, Jerry (California, University Berkeley, United States)
Harada, Tatsuo (California Univ. Berkeley, CA, United States)
Kita, Toshiaki (Hitachi, Ltd. Central Research Laboratory, Kokubunji, Japan)
Date Acquired
August 14, 2013
Publication Date
May 1, 1990
Publication Information
Publication: Applied Optics
Volume: 29
ISSN: 0003-6935
Subject Category
Optics
Accession Number
90A33585
Funding Number(s)
CONTRACT_GRANT: NGR-05-003-450
Distribution Limits
Public
Copyright
Other

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