Development of large CCD arrays with enhanced UV performanceA development status evaluation is presented for proprietary UV-range CCDs for military and scientific applications requiring pixel sizes in the 18-micron range. The most recent developments in UV/X-ray responsive detectors have their bases in the backside illumination of multipinned phase (MPP) 1024 x 1024 CCD arrays, as well as in the initial exploration of open-pinned phase (OPP) techniques. The frontside performance of both MPP and OPP devices is noted to be excellent as well, and pinouts and mounting techniques have been defined which allow easy front-back operation comparisons. Novel backside processing techniques are being refined.
Document ID
19900056228
Acquisition Source
Legacy CDMS
Document Type
Conference Paper
Authors
Varian, Richard H. (Science Applications International Corp. San Diego, CA, United States)
Schaefer, A. Russell (Science Applications International Corp. San Diego, CA, United States)
Cover, John (Science Applications International Corp. San Diego, CA, United States)
Janesick, James R. (JPL Pasadena, CA, United States)
Bredthauer, Richard (Ford Aerospace Corp. Newport Beach, CA, United States)