Acquisition Source
Legacy CDMS
Document Type
Reprint (Version printed in journal)
Authors
Mori, Shigeyuki (NASA Lewis Research Center Cleveland, OH, United States) Morales, Wilfredo (NASA Lewis Research Center Cleveland, OH, United States) Date Acquired
August 14, 2013
Publication Date
August 1, 1990
Publication Information
Publication: Journal of Vacuum Science and Technology A
Volume: 8
ISSN: 0734-2101
Accession Number
90A48550
Distribution Limits
Public