Acquisition Source
Legacy CDMS
Document Type
Reprint (Version printed in journal)
Authors
Hamaguchi, Norihito (Advanced Technology Materials, Inc. New Milford, CT, United States) Vigil, J. (Advanced Technology Materials, Inc. New Milford, CT, United States) Gardiner, R. (Advanced Technology Materials, Inc. New Milford, CT, United States) Kirlin, P. S. (Advanced Technology Materials, Inc. New Milford, CT, United States) Date Acquired
August 14, 2013
Publication Date
April 1, 1990
Publication Information
Publication: Japanese Journal of Applied Physics, Part 2
Volume: 29
ISSN: 0021-4922
Accession Number
90A52201
Funding Number(s)
CONTRACT_GRANT: NAS8-38023
Distribution Limits
Public