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Silane-Pyrolysis Reactor With Nonuniform HeatingImproved reactor serves as last stage in system processing metallurgical-grade silicon feedstock into silicon powder of ultrahigh purity. Silane pyrolized to silicon powder and hydrogen gas via homogeneous decomposition reaction in free space. Features set of individually adjustable electrical heaters and purge flow of hydrogen to improve control of pyrolysis conditions. Power supplied to each heater set in conjunction with flow in reactor to obtain desired distribution of temperature as function of position along reactor.
Document ID
19910000272
Acquisition Source
Legacy CDMS
Document Type
Other - NASA Tech Brief
Authors
Iya, Sridhar K.
(Union Carbide Corp.)
Date Acquired
August 14, 2013
Publication Date
June 1, 1991
Publication Information
Publication: NASA Tech Briefs
Volume: 15
Issue: 6
ISSN: 0145-319X
Subject Category
Fabrication Technology
Report/Patent Number
NPO-17932
Accession Number
91B10272
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.

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