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Growth and characterization of single crystal insulators on siliconAn overview of the growth and characterization of epitaxial insulators on semiconductors is presented. The potential applications include semiconductor-on-insulator structures, three-dimensional and/or high-density integrated circuits, optoelectronic applications such as integrated waveguides and improved gate insulators. The growth and physical characterization of epitaxial fluorides on semiconductors are discussed. Consideration is also given to the epitaxial overgrowth of epitaxial metal layers with CaF2 as well as to the formation of a novel superlattice of Ca particles in epitaxial CaF2.
Document ID
19910028440
Acquisition Source
Legacy CDMS
Document Type
Reprint (Version printed in journal)
Authors
Schowalter, Leo J.
(Rensselaer Polytechnic Institute, Troy, NY, United States)
Fathauer, Robert W.
(JPL Pasadena, CA, United States)
Date Acquired
August 14, 2013
Publication Date
January 1, 1989
Publication Information
Publication: Critical Reviews in Solid State and Materials Sciences
Volume: 15
Issue: 4, 19
ISSN: 1040-8436
Subject Category
Solid-State Physics
Accession Number
91A13063
Distribution Limits
Public
Copyright
Other

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