Acquisition Source
Legacy CDMS
Document Type
Reprint (Version printed in journal)
Authors
Fan, W. C. (Houston Univ. TX, United States) Mesarwi, A. (Houston Univ. TX, United States) Ignatiev, A. (Houston, University TX, United States) Date Acquired
August 15, 2013
Publication Date
December 1, 1990
Publication Information
Publication: Journal of Vacuum Science and Technology A
Volume: 8
ISSN: 0734-2101
Accession Number
91A16137
Distribution Limits
Public