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The effect of Sr and Bi on the Si(100) surface oxidation - Auger electron spectroscopy, low energy electron diffraction, and X-ray photoelectron spectroscopy studyThe effect of Sr and Bi on the oxidation of the Si(100) surface has been studied by Auger electron spectroscopy, low electron diffraction, and X-ray photoelectron spectroscopy. A dramatic enhancement, by a factor of 10, of the Si oxidation has been observed for Si(100) with a Sr overlayer. The SR-enhanced Si oxidation has been studied as a function of O2 exposure and Sr coverage. In contrast to the oxidation promotion of Sr on Si, it has been also observed that a Bi overlayer on Si(100) reduced Si oxidation significantly. Sr adsorption on the Si(100) with a Bi overlayer enhances Si oxidation only at Sr coverage of greater than 0.3 ML.
Document ID
19910031514
Acquisition Source
Legacy CDMS
Document Type
Reprint (Version printed in journal)
External Source(s)
Authors
Fan, W. C.
(Houston Univ. TX, United States)
Mesarwi, A.
(Houston Univ. TX, United States)
Ignatiev, A.
(Houston, University TX, United States)
Date Acquired
August 15, 2013
Publication Date
December 1, 1990
Publication Information
Publication: Journal of Vacuum Science and Technology A
Volume: 8
ISSN: 0734-2101
Subject Category
Solid-State Physics
Accession Number
91A16137
Distribution Limits
Public
Copyright
Other

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