A temperature and pressure controlled calibration system for pressure sensorsA data acquisition and experiment control system capable of simulating temperatures from -184 to +220 C and pressures either absolute or differential from 0 to 344.74 kPa is developed to characterize silicon pressure sensor response to temperature and pressure. System software is described that includes sensor data acquisition, algorithms for numerically derived thermal offset and sensitivity correction, and operation of the environmental chamber and pressure standard. This system is shown to be capable of computer interfaced cryogenic testing to within 1 C and 34.47 Pa of single channel or multiplexed arrays of silicon pressure sensors.
Document ID
19910035037
Acquisition Source
Legacy CDMS
Document Type
Conference Paper
Authors
Chapman, John J. (NASA Langley Research Center Hampton, VA, United States)
Kahng, Seun K. (Oklahoma, University Norman, United States)