Contamination monitoring approaches for EUV space optics

Data from contaminant-induced UV optics degradation studies and particulate models are used here to develop end-of-service-life instrument contamination requirements which are very stringent but achievable. The budget is divided into allocations for each phase of hardware processing. Optical and nonoptical hardware are monitored for particulate and molecular contamination during initial cleaning and baking, assembly, test, and calibration phases. The measured contamination levels are compared to the requirements developed for each phase to provide confidence that the required end-of-life levels will be met.