Acquisition Source
Legacy CDMS
Document Type
Reprint (Version printed in journal)
Authors
Kitabatake, M. (Illinois Univ. Urbana, IL, United States) Fons, P. (Illinois Univ. Urbana, IL, United States) Greene, J. E. (Illinois, University Urbana, United States) Date Acquired
August 14, 2013
Publication Date
February 1, 1991
Publication Information
Publication: Journal of Vacuum Science and Technology A
Volume: 9
ISSN: 0734-2101
Accession Number
91A28181
Distribution Limits
Public