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Record Details

Record 12 of 50
A silicon micromachined piezoresistive accelerometer for health and condition monitoring
Author and Affiliation:
Walsh, Kevin M.(Cincinnati Univ., OH, United States)
Henderson, H. Thurman(NASA Health Monitoring Technology Center for Space Propulsion Systems, Cincinnati, University)
Abstract: Silicon micromachining etching techniques were utilized to batch-fabricate hundreds of general purpose microaccelerometers on a single silicon substrate. Piezoresistive sensing elements were aligned to the back-side patterns using an IR mask aligner and then diffused into the areas of maximum stress. Capping of the two-arm cantilever beam structure was achieved using a combination of electrostatic bonding and low temperature glass films. Overrange protection, critical damping, and overall protection from the outside environment are achieved by controlling the cavity depths of the top and bottom covers. Temperature compensation, amplification, and filtering are performed by a companion LSI chip that is interfaced to the accelerometer by conventional wire-bonding techniques.
Publication Date: Jan 01, 1990
Document ID:
19910046022
(Acquired Nov 28, 1995)
Accession Number: 91A30645
Subject Category: INSTRUMENTATION AND PHOTOGRAPHY
Document Type: Conference Paper
Publication Information: (SEE A91-30626)
Publisher Information: United States
Meeting Information: Annual Health Monitoring Conference for Space Propulsion Systems; 2nd; Nov 14-15, 1990; Cincinnati, OH; United States
Financial Sponsor: NASA; United States
Organization Source: Cincinnati Univ.; OH, United States
Description: 11p; In English
Distribution Limits: Unclassified; Publicly available; Unlimited
Rights: Copyright
NASA Terms: ACCELEROMETERS; ENGINE MONITORING INSTRUMENTS; INTEGRATED CIRCUITS; NETWORK SYNTHESIS; PIEZORESISTIVE TRANSDUCERS; CANTILEVER BEAMS; ELECTROSTATIC BONDING; LARGE SCALE INTEGRATION; SILICON JUNCTIONS; STRESS ANALYSIS
Imprint And Other Notes: IN: Annual Health Monitoring Conference for Space Propulsion Systems, 2nd, Cincinnati, OH, Nov. 14, 15, 1990, Proceedings (A91-30626 12-20). Cincinnati, OH, University of Cincinnati, 1990, p. 381-391.
Availability Source: Other Sources
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