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An abuttable CCD imager for visible and X-ray focal plane arraysA frame-transfer silicon charge-coupled-device (CCD) imager has been developed that can be closely abutted to other imagers on three sides of the imaging array. It is intended for use in multichip arrays. The device has 420 x 420 pixels in the imaging and frame-store regions and is constructed using a three-phase triple-polysilicon process. Particular emphasis has been placed on achieving low-noise charge detection for low-light-level imaging in the visible and maximum energy resolution for X-ray spectroscopic applications. Noise levels of 6 electrons at 1-MHz and less than 3 electrons at 100-kHz data rates have been achieved. Imagers have been fabricated on 1000-Ohm-cm material to maximize quantum efficiency and minimize split events in the soft X-ray regime.
Document ID
19910055164
Acquisition Source
Legacy CDMS
Document Type
Reprint (Version printed in journal)
External Source(s)
Authors
Burke, Barry E.
(Massachusetts Inst. of Tech. Lexington, MA, United States)
Mountain, Robert W.
(Massachusetts Inst. of Tech. Lexington, MA, United States)
Harrison, David C.
(MIT Lexington, MA, United States)
Bautz, Marshall W.
(Massachusetts Inst. of Tech. Lexington, MA, United States)
Doty, John P.
(MIT Cambridge, MA, United States)
Date Acquired
August 15, 2013
Publication Date
May 1, 1991
Publication Information
Publication: IEEE Transactions on Electron Devices
Volume: 38
ISSN: 0018-9383
Subject Category
Instrumentation And Photography
Accession Number
91A39787
Distribution Limits
Public
Copyright
Other

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