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Design and analysis of aspherical multilayer imaging X-ray microscopeSpherical Schwarzschild microscopes for soft X-ray applications in microscopy and projection lithography employ two concentric spherical mirrors that are configured such that the third-order spherical aberration and coma are zero. Based on incoherent, sine-wave MTF calculations, the object-plane resolution of a magnification-factor-20 microscope is presently analyzed as a function of object height and numerical aperture of the primary for several spherical Schwarzschild, conic, and aspherical two-mirror microscope configurations.
Document ID
19910064264
Acquisition Source
Legacy CDMS
Document Type
Reprint (Version printed in journal)
Authors
Shealy, David L.
(Alabama Univ. Birmingham, AL, United States)
Jiang, WU
(Alabama, University Birmingham, United States)
Hoover, Richard B.
(NASA Marshall Space Flight Center Huntsville, AL, United States)
Date Acquired
August 14, 2013
Publication Date
August 1, 1991
Publication Information
Publication: Optical Engineering
Volume: 30
ISSN: 0091-3286
Subject Category
Optics
Accession Number
91A48887
Distribution Limits
Public
Copyright
Other

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