Gravitational and thermal effects in CVD flow and deposition

A three-phased approach is used to investigate the transport phenomena occurring in horizontal CVD reactors. The three phases are made up of laser velocimetry experimental investigations, numerical CFD modeling, and metal-organic chemical vapor deposition experimental studies. Laser velocimetry measurements of flow in a horizontal reactor with a cylindrical flow channel and tilted susceptor demonstrate velocity components arising from thermal expansion and buoyancy effects that significantly exceed the velocity components due to the external applied flow. MOCVD of InP and GaAs thin films in a horizontal reactor channel with a rectangular cross section and a tilted susceptor has also been examined.