Acquisition Source
Legacy CDMS
Document Type
Reprint (Version printed in journal)
Authors
Levenson, L. L. (Colorado, University Colorado Springs, United States) Stan, M. (NASA Lewis Research Center Cleveland, OH, United States) Bhasin, K. B. (NASA Lewis Research Center Cleveland, OH, United States) Date Acquired
August 15, 2013
Publication Date
June 1, 1991
Publication Information
Publication: Journal of Vacuum Science and Technology A
Volume: 9
ISSN: 0734-2101
Accession Number
92A33911
Distribution Limits
Public