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Microstructural investigations of light-emitting porous Si layersThe structural and morphological characteristics of visible-light-emitting porous Si layers produced by anodic and stain etching of single-crystal Si substrates are compared using transmission electron microscopy and atomic force microscopy (AFM). AFM of conventionally anodized, laterally anodized and stain-etched Si layers show that the layers have a fractal-type surface morphology. The anodized layers are rougher than the stain-etched films. At higher magnification 10 nm sized hillocks are visible on the surface. Transmission electron diffraction patterns indicate an amorphous structure with no evidence for the presence of crystalline Si in the near-surface regions of the porous Si layers.
Document ID
19920055385
Acquisition Source
Legacy CDMS
Document Type
Reprint (Version printed in journal)
External Source(s)
Authors
George, T.
(Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States)
Anderson, M. S.
(Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States)
Pike, W. T.
(Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States)
Lin, T. L.
(Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States)
Fathauer, R. W.
(JPL Pasadena, CA, United States)
Jung, K. H.
(Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States)
Kwong, D. L.
(Texas, University Austin, United States)
Date Acquired
August 15, 2013
Publication Date
May 11, 1992
Publication Information
Publication: Applied Physics Letters
Volume: 60
Issue: 19, M
ISSN: 0003-6951
Subject Category
Solid-State Physics
Accession Number
92A38009
Distribution Limits
Public
Copyright
Other

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