Surface morphologies and photoluminescence of diamond films deposited in a hot filament reactorA diamond film made of (100)-oriented diamond crystallites has relatively flat surfaces in parallel with the silicon surface. This is desirable because it provides a smoother surface of the diamond film. The difficulty in retaining the (100)-oriented diamond crystallites is strongly influenced by the growth temperature. This paper reports the results from a study on the surface morphologies of diamond films deposited in a hot filament reactor at reduced substrate temperature compared to that deposited at higher temperature.
Document ID
19920060234
Acquisition Source
Legacy CDMS
Document Type
Conference Paper
Authors
Srivinyunon, T. (NASA Lewis Research Center Cleveland, OH, United States)
Phillips, R. (NASA Lewis Research Center Cleveland, OH, United States)
Cutshaw, C. (NASA Lewis Research Center Cleveland, OH, United States)
Joseph, A. J. (NASA Lewis Research Center Cleveland, OH, United States)