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Use of space ultra-vacuum for high quality semiconductor thin film growthThe utilization of space for materials processing is being expanded through a unique concept of epitaxial thin film growth in the ultra-vacuum of low earth orbit (LEO). This condition can be created in the wake of an orbiting space vehicle; and assuming that the vehicle itself does not pertub the environment, vacuum levels of better than 10 exp -14 torr can be attained. This vacuum environment has the capacity of greatly enhancing epitaxial thin film growth and will be the focus of experiments conducted aboard the Wake Shield Facility (WSF) currently being developed by the Space Vacuum Epitaxy Center (SVEC), Industry, and NASA.
Document ID
19920074681
Acquisition Source
Legacy CDMS
Document Type
Conference Paper
Authors
Ignatiev, A.
(NASA Lyndon B. Johnson Space Center Houston, TX, United States)
Sterling, M.
(Houston, University TX, United States)
Sega, R. M.
(NASA Johnson Space Center Houston, TX, United States)
Date Acquired
August 15, 2013
Publication Date
August 1, 1992
Subject Category
Materials Processing
Report/Patent Number
IAF PAPER 92-0931
Accession Number
92A57305
Funding Number(s)
CONTRACT_GRANT: NAGW-977
Distribution Limits
Public
Copyright
Other

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