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Laboratory experiments in integrated circuit fabricationThe objectives of the experiment are fourfold: to provide practical experience implementing the fundamental processes and technology associated with the science and art of integrated circuit (IC) fabrication; to afford the opportunity for the student to apply the theory associated with IC fabrication and semiconductor device operation; to motivate the student to exercise engineering decisions associated with fabricating integrated circuits; and to complement the theory of n-channel MOS and diffused devices that are presented in the classroom by actually fabricating and testing them. Therefore, a balance between theory and practice can be realized in the education of young engineers, whose education is often criticized as lacking sufficient design and practical content.
Document ID
Document Type
Conference Paper
Jenkins, Thomas J.
(Air Force Inst. of Tech. Wright-Patterson AFB, OH, United States)
Kolesar, Edward S.
(Air Force Inst. of Tech. Wright-Patterson AFB, OH, United States)
Date Acquired
September 6, 2013
Publication Date
June 1, 1993
Publication Information
Publication: NASA. Langley Research Center, National Educators' Workshop. Update 92: Standard Experiments in Engineering Materials Science and Technology
Subject Category
Electronics And Electrical Engineering
Accession Number
Distribution Limits
Work of the US Gov. Public Use Permitted.

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