Novel Coplanar Waveguide to Slotline Transition on High Resistivity Silicon

Two novel coplanar waveguide (CPW) to slotline transitions have been fabricated and tested on high resistivity silicon. The first transition uses an air bridge to couple RF power from the CPW line to the slotline and has the entire circuit on the top side of the wafer. In the second transition, the grounded CPW line and the slotline are on opposite sides of the wafer and are coupled electromagnetically. The measured average intersection loss and return loss per transition are better than 1.5 and 10 dB, respectively, with a bandwidth greater than 30 percent at C-band frequencies.