Acquisition Source
Legacy CDMS
Document Type
Reprint (Version printed in journal)
Authors
Maker, P. D. (Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States) Muller, R. E. (JPL Pasadena, CA, United States) Date Acquired
August 16, 2013
Publication Date
December 1, 1992
Publication Information
Publication: Journal of Vacuum Science and Technology B
Volume: 10
Issue: 6
ISSN: 0734-211X
Accession Number
93A38468
Distribution Limits
Public