Facility for continuous CVD coating of ceramic fibersAn inductively heated CVD furnace of pilot-plant scale, whose hot zone is 150 mm in diameter x 300 mm in length, has been adapted for continuous coating of ceramic yarns. Coatings at very low pressures are possible in this facility due to the fact that the entire apparatus, including yarn feeding and collecting equipment, is under vacuum. SiC yarn has been coated with 0.1-0.2 microns of BN at yarn speeds of 60 cm/min; a 500-m spool; was coated in about 14 hrs. Coating capacity was tripled by adding pulleys to allow three yarn passes through the furnace.
Document ID
19930055527
Acquisition Source
Legacy CDMS
Document Type
Conference Paper
Authors
Moore, Arthur W. (Union Carbide Coating Service Corp. Parma, OH, United States)
Date Acquired
August 16, 2013
Publication Date
January 1, 1992
Publication Information
Publication: In: Chemical vapor deposition of refractory metals and ceramics II; Proceedings of the Symposium, Boston, MA, Dec. 4-6, 1991 (A93-39501 15-25)