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New technique for oil backstreaming contamination measurementsThe backstreaming contamination in the Space Power Facility, Ohio, was measured using small size clean silicon wafers as contamination sensors placed at all measurement sites. Two ellipsometric models were developed to measure the oil film with the contamination film refractive index of DC 705: a continuous, homogeneous film and islands of oil with the islands varying in coverage fraction and height. The island model improved the ellipsometric analysis quality parameter by up to two orders of magnitude. The continuous film model overestimated the oil volume by about 50 percent.
Document ID
19930060517
Acquisition Source
Legacy CDMS
Document Type
Reprint (Version printed in journal)
External Source(s)
Authors
Alterovitz, S. A.
(NASA Lewis Research Center Cleveland, OH, United States)
Speier, H. J.
(NASA Lewis Research Center Cleveland, OH, United States)
Sieg, R. M.
(NASA Lewis Research Center Cleveland, OH, United States)
Drotos, M. N.
(Cleveland State Univ.; NASA, Lewis Research Center OH, United States)
Dunning, J. E.
(Michigan State Uinv., East Lansing; NASA, Lewis Research Center Cleveland, OH, United States)
Date Acquired
August 16, 2013
Publication Date
August 1, 1992
Publication Information
Publication: Journal of Vacuum Science and Technology A
Volume: 10
Issue: 4
ISSN: 0734-2101
Subject Category
Instrumentation And Photography
Accession Number
93A44514
Distribution Limits
Public
Copyright
Other

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