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Composition variations in pulsed-laser-deposited Y-Ba-Cu-O thin films as a function of deposition parametersThe composition of pulsed-ultraviolet-laser-deposited Y-Ba-Cu-O films was examined as a function of position across the substrate, laser fluence, laser spot size, substrate temperature, target conditioning, oxygen pressure and target-substrate distance. Laser fluence, laser spot size, and substrate temperature were found to have little effect on composition within the range investigated. Ablation from a fresh target surface results in films enriched in copper and barium, both of which decrease in concentration until a steady state condition is achieved. Oxygen pressure and target-substrate distance have a significant effect on film composition. In vacuum, copper and barium are slightly concentrated at the center of deposition. With the introduction of an oxygen background pressure, scattering results in copper and barium depletion in the deposition center, an effect which increases with increasing target-substrate distance. A balancing of these two effects results in stoichiometric deposition.
Document ID
19930066537
Acquisition Source
Legacy CDMS
Document Type
Reprint (Version printed in journal)
Authors
Foote, M. C.
(Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States)
Jones, B. B.
(Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States)
Hunt, B. D.
(Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States)
Barner, J. B.
(Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States)
Vasquez, R. P.
(Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States)
Bajuk, L. J.
(JPL Pasadena, CA, United States)
Date Acquired
August 16, 2013
Publication Date
January 1, 1992
Publication Information
Publication: Physica C - Superconductivity
ISSN: 0921-4534
Subject Category
Solid-State Physics
Accession Number
93A50534
Distribution Limits
Public
Copyright
Other

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