Acquisition Source
Legacy CDMS
Document Type
Reprint (Version printed in journal)
Authors
Choi, S. W. (NASA Langley Research Center Hampton, VA, United States) Lucovsky, G. (NASA Langley Research Center Hampton, VA, United States) Bachmann, K. J. (North Carolina State Univ. Raleigh, United States) Date Acquired
August 16, 2013
Publication Date
June 1, 1992
Publication Information
Publication: Journal of Vacuum Science and Technology B
Volume: 10
Issue: 3
ISSN: 0734-211X
Accession Number
93A51918
Funding Number(s)
CONTRACT_GRANT: NAG1-1100
Distribution Limits
Public