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Laser-Induced Fluorescence Helps Diagnose Plasma ProcessesTechnique developed to provide in situ monitoring of rates of ion sputter erosion of accelerator electrodes in ion thrusters also used for ground-based applications to monitor, calibrate, and otherwise diagnose plasma processes in fabrication of electronic and optical devices. Involves use of laser-induced-fluorescence measurements, which provide information on rates of ion etching, inferred rates of sputter deposition, and concentrations of contaminants.
Document ID
19940000303
Acquisition Source
Legacy CDMS
Document Type
Other - NASA Tech Brief
Authors
Beattie, J. R.
(Hughes Research Laboratories)
Mattosian, J. N.
(Hughes Research Laboratories)
Gaeta, C. J.
(Hughes Research Laboratories)
Turley, R. S.
(Hughes Research Laboratories)
Williams, J. D.
(Hughes Research Laboratories)
Williamson, W. S.
(Hughes Research Laboratories)
Date Acquired
August 16, 2013
Publication Date
May 1, 1994
Publication Information
Publication: Laser Tech. Brief.
Volume: 2
Issue: 2
Subject Category
Physical Sciences
Report/Patent Number
LEW-15597
Accession Number
94B10303
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.

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