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Improved Electromechanical Infrared SensorProposed electromechanical infrared detector improved version of device described in "Micromachined Electron-Tunneling Infrared Detectors" (NPO-18413). Fabrication easier, and undesired sensitivity to acceleration reduced. In devices, diaphragms and other components made of micromachined silicon, and displacements of diaphragms measured by electron tunneling displacement transducer {see "Micromachined Tunneling Accelerometer" (NPO-18513)}. Improved version offers enhanced frequency response and less spurious response to acceleration.
Document ID
19940000617
Acquisition Source
Legacy CDMS
Document Type
Other - NASA Tech Brief
Authors
Kenny, Thomas W. (Caltech)
Kaiser, William J. (Caltech)
Date Acquired
August 16, 2013
Publication Date
November 1, 1994
Publication Information
Publication: NASA Tech Briefs
Volume: 18
Issue: 11
ISSN: 0145-319X
Subject Category
Electronic Components And Circuits
Report/Patent Number
NPO-18560
Accession Number
94B10617
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.

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