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Furnace Tubes For Depositing Parylene-N(TM) On Hgl(2) CrystalsShapes of quartz pyrolysis tubes used to deposit Parylene-N on Hgl(2) crystals modified to improve quality of coating. Use of zigzag tube, along with higher processing temperature, resulted in coating of better quality, including greater transparency and more uniformity of appearance. In addition, longer path taken by dimer in passing by baffles increases time spent in high-temperature region, increasing degree of cracking even more.
Document ID
19940000652
Acquisition Source
Legacy CDMS
Document Type
Other - NASA Tech Brief
Authors
Iwanczyk, Jan S.
(Xsirius, Inc.)
Wang, Yuzhong, J.
(Xsirius, Inc.)
Date Acquired
August 16, 2013
Publication Date
November 1, 1994
Publication Information
Publication: NASA Tech Briefs
Volume: 18
Issue: 11
ISSN: 0145-319X
Subject Category
Fabrication Technology
Report/Patent Number
NPO-18949
Accession Number
94B10652
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.

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