Magnetically suspended stepping motors for clean room and vacuum environments

To answer the growing needs for super-clean or contact free actuators for uses in clean rooms, vacuum chambers, and space, innovative actuators which combine the functions of stepping motors and magnetic bearings in one body were developed. The rotor of the magnetically suspended stepping motor is suspended like a magnetic bearing and rotated and positioned like a stepping motor. The important trait of the motor is that it is not a simple mixture or combination of a stepping motor and conventional magnetic bearing, but an amalgam of a stepping motor and a magnetic bearing. Owing to optimal design and feed-back control, a toothed stator and rotor are all that are needed structurewise for stable suspension. More than ten types of motors such as linear type, high accuracy rotary type, two-dimensional type, and high vacuum type were built and tested. This paper describes the structure and design of these motors and their performance for such applications as precise positioning rotary table, linear conveyor system, and theta-zeta positioner for clean room and high vacuum use.