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Vacuum vapor depositionA method and apparatus is described for vapor deposition of a thin metallic film utilizing an ionized gas arc directed onto a source material spaced from a substrate to be coated in a substantial vacuum while providing a pressure differential between the source and the substrate so that, as a portion of the source is vaporized, the vapors are carried to the substrate. The apparatus includes a modified tungsten arc welding torch having a hollow electrode through which a gas, preferably inert, flows and an arc is struck between the electrode and the source. The torch, source, and substrate are confined within a chamber within which a vacuum is drawn. When the arc is struck, a portion of the source is vaporized and the vapors flow rapidly toward the substrate. A reflecting shield is positioned about the torch above the electrode and the source to ensure that the arc is struck between the electrode and the source at startup. The electrode and the source may be confined within a vapor guide housing having a duct opening toward the substrate for directing the vapors onto the substrate.
Document ID
19950016141
Acquisition Source
Legacy CDMS
Document Type
Other - Patent
Authors
Poorman, Richard M.
(NASA Marshall Space Flight Center Huntsville, AL, United States)
Weeks, Jack L.
(NASA Marshall Space Flight Center Huntsville, AL, United States)
Date Acquired
August 16, 2013
Publication Date
January 10, 1995
Subject Category
Nonmetallic Materials
Report/Patent Number
Patent Number: NASA-CASE-MFS-28652-1
Patent Application Number: US-PATENT-APPL-SN-191309
Patent Number: US-PATENT-5,380,415
Accession Number
95N22558
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.
Patent
NASA-CASE-MFS-28652-1|US-PATENT-5,380,415
Patent Application
US-PATENT-APPL-SN-191309
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