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Smart materials fabrication and materials for micro-electro-mechanical systems; Symposium Proceedings, San Francisco, CA, Apr. 28-30, 1992A conference on the rapidly developing fields of `smart materials' and micro-electro-mechanical systems produced papers in the areas of fabrication and characterization of ferroelectric thin films; polycrystalline silicon; optical, chemical, and biological sensors; thin film shape memory alloys; materials characterization; and alternative materials and applications.
Document ID
19950048381
Acquisition Source
Legacy CDMS
Document Type
Conference Proceedings
Authors
Jardine, A. Peter (State Univ. of New York, Stony Brook, NY, United States)
Johnson, George C. (California Univ. Berkeley, CA, United States)
Crowson, Andrew (U.S. Army Research Office, Research Triangle Park, NC United States)
Allen, Mark (Georgia Inst. of Tech., Atlanta, GA United States)
Date Acquired
August 16, 2013
Publication Date
January 1, 1992
Publication Information
Publisher: Materials Research Society (MRS Symposium Proceedings, Vol. 276)
ISSN: 0272-9172
ISBN: 1-55899-171-9
Subject Category
Electronics And Electrical Engineering
Accession Number
95A79980
Distribution Limits
Public
Copyright
Other

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