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Capacitive Position Sensor For AccelerometerCapacitive position sensor measures displacement of proof mass in prototype accelerometer described in "Single-Crystal Springs for Accelerometers" (NPO-18795). Sensor is ultrasensitive, miniature device operating at ultra-high frequency and described in more detail in "Ultra-High-Frequency Capacitive Displacement Sensor," (NPO-18675). Advances in design and fabrication of prototype accelerometer also applicable to magnetometers and other sensors in which sensed quantities measured in terms of deflections of small springs.
Document ID
19950065191
Acquisition Source
Legacy CDMS
Document Type
Other - NASA Tech Brief
Authors
Vanzandt, Thomas R.
(Caltech)
Kaiser, William J.
(Caltech)
Kenny, Thomas W.
(Caltech)
Date Acquired
August 17, 2013
Publication Date
January 1, 1995
Publication Information
Publication: NASA Tech Briefs
Volume: 19
Issue: 1
ISSN: 0145-319X
Subject Category
Mechanics
Report/Patent Number
NPO-18794
Accession Number
95B10032
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.

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