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Multilayer Thin-Film MicrocapacitorsMiniature capacitors containing multiple alternating thin-film dielectric and metal layers proposed, especially for use in integrated and hybrid electronic circuits. Because capacitance inversely proportional to thickness of dielectric layers, use of thin, high-quality dielectric layers affords capacitance and energy-storage densities much greater than now available. These devices much smaller and more reliable than state-of-art capacitors.
Document ID
19950065614
Acquisition Source
Legacy CDMS
Document Type
Other - NASA Tech Brief
Authors
Thakoor, Sarita
(Caltech)
Thakoor, Anil
(Caltech)
Karmon, Dan
(Caltech)
Date Acquired
August 17, 2013
Publication Date
September 1, 1995
Publication Information
Publication: NASA Tech Briefs
Volume: 19
Issue: 9
ISSN: 0145-319X
Subject Category
Electronic Components And Circuits
Report/Patent Number
NPO-19403
Accession Number
95B10455
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.

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