IR Interference Filters Made Of Al Patterns On Si Substrates

Filters relatively thin and better accommodate convergent infrared beams. Infrared (IR) interference filters with pass bands centered at wavelength of about 70 micrometer made in form of aluminum patterns 1,000 Angstrom thick on both sides of silicon substrates 12 to 15 micrometer thick. Substrates, in turn, mounted on silicon frames 0.2 millimeter thick. Prototypes of class of miniature band-pass infrared filters small enough to be bonded to, and cooled with, infrared detectors.