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Transmission Electron Microscope Measures Lattice ParametersConvergent-beam microdiffraction (CBM) in thermionic-emission transmission electron microscope (TEM) is technique for measuring lattice parameters of nanometer-sized specimens of crystalline materials. Lattice parameters determined by use of CBM accurate to within few parts in thousand. Technique developed especially for use in quantifying lattice parameters, and thus strains, in epitaxial mismatched-crystal-lattice multilayer structures in multiple-quantum-well and other advanced semiconductor electronic devices. Ability to determine strains in indivdual layers contributes to understanding of novel electronic behaviors of devices.
Document ID
19960022400
Acquisition Source
Legacy CDMS
Document Type
Other - NASA Tech Brief
Authors
Pike, William T.
(Caltech)
Date Acquired
August 17, 2013
Publication Date
May 1, 1996
Publication Information
Publication: NASA Tech Briefs
Volume: 20
Issue: 5
ISSN: 0145-319X
Subject Category
Physical Sciences
Report/Patent Number
NPO-19070
Accession Number
96B10215
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.

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