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Micromechanical Switches on GaAs for Microwave ApplicationsIn this presentation, we describe the fabrication of micro-electro-mechanical system (MEMS) devices, in particular, of low-frequency multi-element electrical switches using SiO2 cantilevers. The switches discussed are related to micromechanical membrane structures used to perform switching of optical signals on silicon substrates. These switches use a thin metal membrane which is actuated by an electrostatic potential, causing the switch to make or break contact. The advantages include: superior isolation, high power handling capabilities, high radiation hardening, very low power operations, and the ability to integrate onto GaAs monolithic microwave integrated circuit (MMIC) chips.
Document ID
19960054111
Acquisition Source
Legacy CDMS
Document Type
Conference Paper
Authors
Randall, John N.
(Texas Instruments, Inc. Dallas, TX United States)
Goldsmith, Chuck
(Texas Instruments, Inc. Dallas, TX United States)
Denniston, David
(Texas Instruments, Inc. Dallas, TX United States)
Lin, Tsen-Hwang
(Texas Instruments, Inc. Dallas, TX United States)
Date Acquired
September 6, 2013
Publication Date
January 1, 1995
Subject Category
Mechanical Engineering
Accession Number
96N36357
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.

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