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Surface Micro-Machining: Progress Towards Micro-Electro Mechanical SystemsSurface micromachining is a technique for building electromechanical systems in silicon. A number of electromechanical systems have been implemented in miniature using the fundamental structural building blocks of tensile and non-tensile springs, differential capacitance sensing cells, and electrostatic drive. The integration of complicated mechanical structures and electrical circuits onto a single chip is expected to improve reliability and testability of systems. Reduction in interconnect wiring, the increased use of automation, and the inherent reliability of integrated circuits will all contribute to increased reliability of systems.
Document ID
19960054132
Acquisition Source
Legacy CDMS
Document Type
Conference Paper
Authors
Doscher, James
(Analog Devices, Inc. Wilmington, MA United States)
Date Acquired
September 6, 2013
Publication Date
January 1, 1995
Subject Category
Mechanical Engineering
Accession Number
96N36378
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.

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