Spatial Resolution and Detectability Limits in Thin-Film X-Ray Microanalysis

The major advantages of performing x-ray microanalysis in the analytical electron microscope (AEM) are the high compositional spatial resolution and the elemental analysis sensitivity. Unfortunately, there is usually a trade-off between these two advantages. This paper discusses the factors involved in the optimization of both spatial resolution and sensitivity during x-ray microanalysis and shows the results of such optimization experiments for several AEM instruments.