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Record Details

Record 80 of 3091
Infrared bolometers with silicon nitride micromesh absorbers
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Author and Affiliation:
Bock, J. J.(Jet Propulsion Lab., California Inst. of Tech., Pasadena, CA United States)
Turner, A. D.(Jet Propulsion Lab., California Inst. of Tech., Pasadena, CA United States)
DelCastillo, H. M.(Jet Propulsion Lab., California Inst. of Tech., Pasadena, CA United States)
Beeman, J. W.(California Univ., Berkeley. Lawrence Berkeley Lab, CA United States)
Lange, A. E.(California Inst. of Tech., Pasadena, CA United States)
Mauskopf, P. D.(California Inst. of Tech., Pasadena, CA United States)
Abstract: Sensitive far infrared and millimeter wave bolometers fabricated from a freestanding membrane of low stress silicon nitride are reported. The absorber, consisting of a metallized silicon nitride micromesh thermally isolated by radial legs of silicon nitride, is placed in an integrating cavity to efficiently couple to single mode or multiple mode infrared radiation. This structure provides low heat capacity, low thermal conduction and minimal cross section to energetic particles. A neutron transmutation doped Ge thermister is bump bonded to the center of the device and read out with evaporated Cr-Au leads. The limiting performance of the micromesh absorber is discussed and the recent results obtained from a 300 mK cold stage are summarized.
Publication Date: Dec 01, 1996
Document ID:
19970018420
(Acquired Jun 25, 1997)
Accession Number: 97N20399
Subject Category: SPACECRAFT INSTRUMENTATION
Document Type: Conference Paper
Publication Information: 119-122; (SEE 19970018394)
Publisher Information: Netherlands
Contract/Grant/Task Num: NAGw-4754
Financial Sponsor: Jet Propulsion Lab., California Inst. of Tech.; Pasadena, CA United States
NASA; Washington, DC United States
Organization Source: Jet Propulsion Lab., California Inst. of Tech.; Pasadena, CA United States
Description: 4p; In English
Distribution Limits: Unclassified; Publicly available; Unlimited
Rights: No Copyright
NASA Terms: BOLOMETERS; INFRARED DETECTORS; MILLIMETER WAVES; DOPED CRYSTALS; FABRICATION; SILICON NITRIDES; ENERGETIC PARTICLES; SPECIFIC HEAT; MESH; THERMISTORS; INFRARED ASTRONOMY; FAR INFRARED RADIATION; DIELECTRICS
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