Acquisition Source
Legacy CDMS
Document Type
Reprint (Version printed in journal)
Authors
Chen, Liang-Yu (NASA Lewis Research Center Cleveland, OH United States) Hunter, Gary W. (NASA Lewis Research Center Cleveland, OH United States) Neudeck, Philip G. (NASA Lewis Research Center Cleveland, OH United States) Knight, Dak (NASA Lewis Research Center Cleveland, OH United States) Date Acquired
August 19, 2013
Publication Date
September 1, 1998
Publication Information
Publication: Journal of Vacuum Science and Technology A
Publisher: American Inst. of Physics
Volume: 16
Issue: 5
ISSN: 0734-2101
Distribution Limits
Public