Acquisition Source
Goddard Space Flight Center
Document Type
Reprint (Version printed in journal)
Authors
Fettig, Rainer K. (Raytheon Co. Greenbelt, MD United States) Kuhn, Jonathan L. (NASA Goddard Space Flight Center Greenbelt, MD United States) Moseley, S. Harvey (NASA Goddard Space Flight Center Greenbelt, MD United States) Kutyrev, Alexander S. (Raytheon Co. Greenbelt, MD United States) Orloff, Jon (Maryland Univ. College Park, MD United States) Lu, Shude (Maryland Univ. College Park, MD United States) Date Acquired
August 18, 2013
Publication Date
July 2, 1999
Meeting Information
Meeting: Micromachining and Microfabrication
Location: Santa Clara, CA
Country: United States
Start Date: September 21, 1999
Sponsors: International Society for Optical Engineering
Distribution Limits
Public