Document Type
Reprint (Version printed in journal)
Authors
Buehler, M. C. (Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA United States) Bell, L. D. (Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA United States) Hecht, M. H. (Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA United States) Date Acquired
August 19, 2013
Publication Date
January 5, 1996
Publication Information
Publication: Journal of Vacuum Science and Technology. Part A
Volume: 14
Issue: 3
ISSN: 0734-2101
Subject Category
Instrumentation And Photography Distribution Limits
Public