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Record Details

Record 1 of 23726
\A Gravity-Related Transport in Reactive Off-Axis Sputtering Deposition
Author and Affiliation:
Zhu, Shen(Universities Space Research Association, Huntsville, AL United States)
Su, C.-H.(NASA Marshall Space Flight Center, Huntsville, AL United States)
Lehozeky, S. L.(NASA Marshall Space Flight Center, Huntsville, AL United States)
Abstract: An experiment was designed to investigate the transport characterization of reactive off- axis sputtering deposition. Three transport regions were observed when the growth pressures vary from 5 mtorr to 150 mtorr. A new gravity-related phenomenon was revealed in film growth at relatively high growth pressures. This effect is related to the collision process or thermalization of transport species. This study also suggests a design for the substrate holder orientation in the off-axis sputtering system.
Publication Date: Jan 01, 2000
Document ID:
20000034905
(Acquired May 12, 2000)
Subject Category: NONMETALLIC MATERIALS
Document Type: Preprint
Contract/Grant/Task Num: NCC8-66
Financial Sponsor: NASA Marshall Space Flight Center; Huntsville, AL United States
Organization Source: NASA Marshall Space Flight Center; Huntsville, AL United States
Description: 1p; In English
Distribution Limits: Unclassified; Publicly available; Unlimited
Rights: No Copyright
NASA Terms: EXPERIMENT DESIGN; RESEARCH; SUBSTRATES; DEPOSITION; SPUTTERING; REACTIVITY; HOLDERS; HIGH PRESSURE; GRAVITATION; COLLISIONS
Availability Source: Other Sources
Availability Notes: Abstract Only
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