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\A Gravity-Related Transport in Reactive Off-Axis Sputtering DepositionAn experiment was designed to investigate the transport characterization of reactive off- axis sputtering deposition. Three transport regions were observed when the growth pressures vary from 5 mtorr to 150 mtorr. A new gravity-related phenomenon was revealed in film growth at relatively high growth pressures. This effect is related to the collision process or thermalization of transport species. This study also suggests a design for the substrate holder orientation in the off-axis sputtering system.
Document ID
20000034905
Acquisition Source
Marshall Space Flight Center
Document Type
Preprint (Draft being sent to journal)
Authors
Zhu, Shen (Universities Space Research Association Huntsville, AL United States)
Su, C.-H. (NASA Marshall Space Flight Center Huntsville, AL United States)
Lehozeky, S. L. (NASA Marshall Space Flight Center Huntsville, AL United States)
Date Acquired
August 19, 2013
Publication Date
January 1, 2000
Subject Category
Nonmetallic Materials
Funding Number(s)
CONTRACT_GRANT: NCC8-66
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.

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