Acquisition Source
Glenn Research Center
Document Type
Preprint (Draft being sent to journal)
Authors
Chen, Liang-Yu (AYT Corp. Brook Park, OH United States) Hunter, Gary W. (NASA Glenn Research Center Cleveland, OH United States) Neudeck, Philip G. (NASA Glenn Research Center Cleveland, OH United States) Date Acquired
September 7, 2013
Publication Date
August 1, 2000
Subject Category
Electronics And Electrical Engineering Report/Patent Number
E-12188NASA/TM-2000-209940NAS 1.15:209940 Meeting Information
Meeting: First International Conference on Microelectronics and Interfaces
Location: Santa Clara, CA
Country: United States
Start Date: February 7, 2000
End Date: February 11, 2000
Sponsors: American Vacuum Society
Funding Number(s)
CONTRACT_GRANT: NAS3-27571
PROJECT: RTOP 242-90-0C
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.