Acquisition Source
Headquarters
Document Type
Preprint (Draft being sent to journal)
Authors
Kuhn, Jonathan, L. (NASA Goddard Space Flight Center Greenbelt, MD United States) Fettig, Rainer K. (Raytheon ITSS Greenbelt, MD United States) Moseley, S. Harvey (NASA Goddard Space Flight Center Greenbelt, MD United States) Kutyrev, Alexander S. (Raytheon ITSS Greenbelt, MD United States) Orloff, Jon (Maryland Univ. College Park, MD United States) Date Acquired
September 7, 2013
Publication Date
January 1, 2000
Meeting Information
Meeting: Micromachining and Microfabrication
Location: Santa Clara, CA
Country: United States
Start Date: September 1, 2000
Sponsors: International Society for Optical Engineering
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.