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A Self-Consistent Plasma-Sheath Model for the Inductively Coupled Plasma ReactorAccurate determination of ion flux on a wafer requires a self-consistent, multidimensional modeling of plasma reactor that adequately resolves the sheath region adjoining the wafer. This level of modeling is difficult to achieve since non-collisional sheath lengths are usually 3-4 orders of magnitude smaller than the reactor scale. Also, the drift-diffusion equations used for ion transport becomes invalid in the sheath since the ion frictional force is no longer in equilibrium with drift and diffusion forces. The alternative is to use a full momentum equation for each ionic species. In this work we will present results from a self-consistent reactor scale-sheath scale model for 2D inductively coupled plasmas. The goal of this study is to improve the modeling capabilities and assess the importance of additional physics in determining important reactor performance features, such as the ion flux uniformity, coil frequency and configuration effects, etc. Effect of numerical dissipation on the solution quality will also be discussed.
Document ID
20010084622
Acquisition Source
Ames Research Center
Document Type
Conference Paper
Authors
Bose, Deepak
(Eloret Corp. Moffett Field, CA United States)
Govindam, T. R.
(Eloret Corp. Moffett Field, CA United States)
Meyyappan, M.
(Eloret Corp. Moffett Field, CA United States)
Date Acquired
August 20, 2013
Publication Date
January 3, 2000
Subject Category
Plasma Physics
Meeting Information
Meeting: Gaseous Electronics Conference
Location: Houston, TX
Country: United States
Start Date: October 1, 2000
Funding Number(s)
CONTRACT_GRANT: NAS2-99092
PROJECT: RTOP 632-10-01
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.

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