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fourier-transform optical microsystemsThe design, fabrication, and initial characterization of a miniature single-pass Fourier-transform spectrometer (FTS) that has an optical bench that measures 1 cm x 5 cm x 10 cm is presented. The FTS is predicated on the classic Michelson interferometer design with a moving mirror. Precision translation of the mirror is accomplished by microfabrication of dovetailed bearing surfaces along single-crystal planes in silicon. Although it is miniaturized, the FTS maintains a relatively high spectral resolution, 0.1 cm-1, with adequate optical throughput.
Document ID
20040088809
Document Type
Reprint (Version printed in journal)
Authors
Collins, S. D.
(University of California Davis 95616, United States)
Smith, R. L.
Gonzalez, C.
Stewart, K. P.
Hagopian, J. G.
Sirota, J. M.
Date Acquired
August 21, 2013
Publication Date
June 15, 1999
Publication Information
Publication: Optics letters
Volume: 24
Issue: 12
ISSN: 0146-9592
Subject Category
Life Sciences (General)
Distribution Limits
Public
Copyright
Other
Keywords
NASA Discipline Environmental Health
Non-NASA Center