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Project: Micromachined High-Frequency Circuits For Sub-mm-wave SensorsA novel micromachined resonator at 45 GHz based on a defect in a periodic electromagnetic bandgap structure (EBG) and a two-pole Tchebysbev filter with 1.4% 0.15 dB equiripple bandwidth and 2.3 dB loss employing this resonator are presented in this letter. The periodic bandgap structure is realized on a 400 micron thick high-resistivity silicon wafer using deep reactive ion etching techniques. The resonator and filter can be accessed via coplanar waveguide feeds.
Document ID
20040110972
Acquisition Source
Glenn Research Center
Document Type
Reprint (Version printed in journal)
Authors
Papapolymerou, Ioannis John
(Georgia Inst. of Tech. Atlanta, GA, United States)
Date Acquired
August 21, 2013
Publication Date
September 13, 2004
Subject Category
Electronics And Electrical Engineering
Funding Number(s)
CONTRACT_GRANT: NCC3-900
Distribution Limits
Public
Copyright
Other

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