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Development of Testing Methodologies for the Mechanical Properties of MEMSThis effort is to investigate and design testing strategies to determine the mechanical properties of MicroElectroMechanical Systems (MEMS) as well as investigate the development of a MEMS Probabilistic Design Methodology (PDM). One item of potential interest is the design of a test for the Weibull size effect in pressure membranes. The Weibull size effect is a consequence of a stochastic strength response predicted from the Weibull distribution. Confirming that MEMS strength is controlled by the Weibull distribution will enable the development of a probabilistic design methodology for MEMS - similar to the GRC developed CARES/Life program for bulk ceramics. However, the primary area of investigation will most likely be analysis and modeling of material interfaces for strength as well as developing a strategy to handle stress singularities at sharp corners, filets, and material interfaces. This will be a continuation of the previous years work. The ultimate objective of this effort is to further develop and verify the ability of the Ceramics Analysis and Reliability Evaluation of Structures Life (CARES/Life) code to predict the time-dependent reliability of MEMS structures subjected to multiple transient loads.
Document ID
Document Type
Ekwaro-Osire, Stephen
(Texas Technological Univ. Lubbock, TX, United States)
Date Acquired
August 22, 2013
Publication Date
January 1, 2003
Publication Information
Publication: 2003 NASA Faculty Fellowship Program at Glenn Research Center
Subject Category
Mechanical Engineering
Distribution Limits
Work of the US Gov. Public Use Permitted.
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