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Optically Stimulated Electron Emission Contamination Monitor and MethodAn apparatus and method for performing quality inspections on a test surface based on optically stimulated emission of electrons. In one embodiment, the apparatus comprises a device for producing optical radiation having a plurality of different spectrum lines, selecting at least one of the spectrum lines, and directing the selected spectrum line to the test surface, and circuitry for detecting a current of photoelectrons emitted from the test surface, generating a signal indicative of photoelectron current, and for indicating a condition of quality based on the generated signal indicative of the photoelectron current. In one embodiment, the method comprises producing optical radiation having a plurality of different spectrum lines, selecting at least one of the spectrum lines and directing the selected spectrum line to the test surface, detecting a current of photoelectrons emitted from the test surface and generating a signal indicative of photoelectron current, and indicating a condition of quality based on the generated signal indicative of the photoelectron current.
Document ID
20050167854
Acquisition Source
Headquarters
Document Type
Other - Patent
Authors
Christopher S Welch
Daniel F Perey
Date Acquired
August 23, 2013
Publication Date
February 15, 2005
Subject Category
Optics
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.
Patent
US-Patent-6,856,403
Patent Application
US-Patent-Appl-SN-662161
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